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Noise minimised high resolution digital holographic microscopy applied to surface topography
Achimova E., Abaskin V., Claus D., Pedrini G., Shevkunov I., Katkovnik V.

Institute of Applied Physics, the Academy of Sciences of Moldova, Chisinau, Moldova,
Institut fur Technische Optik, the University of Stuttgart, Stuttgart, Germany,
St. Petersburg State University, St. Petersburg, Russia,
Department of Signal Processing, Technology University of Tampere, Tampere, Finland

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DOI: 10.18287/2412-6179-2018-42-2-267-272

Страницы: 267-272.

Аннотация:
The topography of surface relief gratings was studied by digital holographic microscopy. The applicability of the method for quantitative measurements of surface microstructure at nanoscale was demonstrated. The method for wavefront reconstruction of surface relief from a digital hologram recorded in off-axis configuration was also applied. The main feature is noise filtration due to the presence of noise in the recorded intensity distribution and the use of all orders of the hologram. Reconstruction results proved a better effectiveness of our approach for topography studying of relief grating patterned on a ChG As2S3 – Se nanomultilayers in comparison with standard Fourier Transform and Atom Force Microscope methods.

Ключевые слова:
digital holography; digital image processing; diffraction gratings.

Цитирование:
Achimova E, Abaskin V, Claus D, Pedrini G, Shevkunov I, Katkovnik V. Noise minimized high resolution digital holographic microscopy applied to surface topography. Computer Optics 2018; 42(2): 267-272. DOI: 10.18287/2412-6179-2018-42-2-267-272.

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