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Non-contact precision measurement of linear displacements using DOEs that generate Bessel modes

V.V. Kotlyar, R.V. Skidanov, S.N. Khonina

Image Processing Systems Institute of RAS, Samara

 PDF, 632 kB

Pages: 102-104.

Full text of article: Russian language.

Abstract:
The non-contact measurement of linear displacements can be performed by numerous optical methods. The most well-known methods are the projection and interferometric methods. The projection method allows to measure linear displacements in the range from 0.01 mm to 103 mm with the accuracy of ~0.001 mm - 0.1 mm [1]. In this case, measuring microscopes or length gages are used. Human eyesight is required to achieve high accuracy of measurements, and this hampers the automation of the method. Automated systems based on the projection method allow to determine linear displacements with an accuracy of about 0.01 mm [2,3]. In this case, the absolute measurement error increases together with the growth of the measured displacement. The interferometric method allows to measure linear displacements in the range from 10-4 mm to 10-2 mm with an accuracy of ~ 10-4 mm [4]. In this case, the absolute measurement error remains practically unchanged. These two methods cover the absolutely different ranges of the measured linear displacements. There remains quite a large gap between these ranges, that is, the displacements with the size from 10-2 mm to 10-1 mm are difficult to measure using one of these methods. A method is required to measure linear displacements in this range. This work proposes to use for this purpose the beams rotating around the propagation axis. The simplest of such beams is the superposition of two Bessel functions with different features and scales. The rotating Bessel beams, generated by binary phase DOEs with a spatial carrier frequency, are considered as a means for measuring linear displacements [5, 6].

Citation:
Kotlyar VV, Skidanov RV, Khonina SN. Non-contact precision measurement of linear displacement using DOEs that generate Bessel modes. Computer Optics 2001; 21: 102-104.

References:
  1. Afanasyev VA. Optical measurements. Moscow: "Vysshaya Shkola" Publisher; 1981.
  2. Druyan YA, et al. [In Russian]. Elektronnaya Promyshlennostj 1986; 6: 44.
  3. Maslyukov YS. Estimation of the limiting errors of measuring systems with transducers on charge-coupled devices [In Russian]. Optiko-Mehanicheskaya Promyshlennostj 1990; 4: 70-73.
  4. Borynyak LA, Krasnopevtsev EA, Loginov AV, Shtygashev AA. Accuracy of determining displacements in holographic interferometers [In Russian]. Avtometriya 1992; 6: 62-74.
  5. Paakkonen P, Lautanen J, Koukenen M, Ruittinen M, Turunen J, Khonina SN, Kotlyar VV, Soifer VA, Friberg AT. Rotating optical fields: experimental demonstration with diffractive optics. J Mod Opt 1998; 45(11): 2355-2369.
  6. Khonina SN, Kotlyar VV, Soifer VA, Lautanen J, Koukenen M, Turunen J. Generating a couple of rotating non-diffracting beams using a binary phase DOE. Optik 1999; 110(3): 137-144.

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