(22) * << * >> * Russian * English * Content * All Issues

Diffractive optics in measuring technologies
A.G. Poleshchuk1, V.P. Koronkevich1, V.P. Korolkov1, A.G. Sedukhin1

1 Institute of Automation and Electrometry of the Siberian Branch of the Russian Academy of Sciences (Novosibirsk)

 PDF, 783 kB

Pages: 86-95.

Full text of article: Russian language.

Abstract:
The development of optics is associated with the widespread application of computer-synthesized diffractive optical elements (DOEs), that modulate the initial wavefront by varying the optical and geometric thickness of the material [1, 2]. The range of DOE applications in various fields of optoelectronics, including laser metrology, is constantly expanding. Due to geometric and wave transformations, new elements allow to design and create optical measuring systems of a new class, where the reference wavefront is determined by the topology (structure) of the element. An example of this is the class of interferometers used to control spherical and aspherical optical surfaces.

Keywords:
diffractive optic, diffractive optical element, DOE, wavefront, optoelectronic, laser metrology, geometric and wave transformation, optical surface.

Citation:
Poleshchuk AG, Koronkevich VP, Korolkov VP, Sedukhin AG. Diffractive optics in measuring technologies. Computer Optics 2001; 22: 86-95.

References:
  1. Soifer VA, ed. Methods of computer optics [In Russian]. Moscow: "Fizmatlit" Publisher; 2000.
  2. Koronkevich VP, Lenkova GA, Mikhaltsova IA, Palchikova IG, Poleshchuk AG. Kinoform optical elements: methods of design, manufacturing methods, and practical applications [In Russian]. Avtometriya 1985; 1: 4-21.
  3. Poleshchuk AG, Churin EG, Koronkevich VP, Korolkov VP. Polar coordinate laser pattern generator for fabrication of diffractive optical elements with arbitrary structure. Appl Opt 1999; 38: 1295-1301.
  4. Cherkashin VV, Churin EG, Korolkov VP, Koronkevich VP, Kharissov AA, Poleshchuk AG, Burge JH. Processing parameters optimisation for thermochemical writing of DOEs on chromium films. Proc SPIE 1997; 3010: 168-179.
  5. Burge JH, Dettmann LR, West SC. Null correctors for 6.5-m ƒ/1.25 paraboloidal mirrors // Fabrication and Testing of Aspheres 1999: 182-186.
  6. Gale MT, Rossi M, Pedersen G, Schuetz H. Fabrication of continuous - relief micro- optical elements by direct laser writing in photoresist. Opt Eng 1994; 33(11): 3556-3566.
  7. Neugebauer G, Hauck R, Bryngdahl O. Computer-generated holograms: carrier of polar geometry. Appl Opt 1985; 24: 777-784.
  8. Morris GM, Faklis D. Achromatic and apochromatic diffractive singlets. In Book: Diffractive optics: Design, fabrication and application. Conference, Rochester, NY 1994: 53.
  9. Burge JH. Application of computer-generated hologram for interferometric measurement of large aspheric optics. Proc SPIE 1995; 2576: 258-269.
  10. Koronkevich VP, Mikhaltsova IA, Churin EG, Yurlov YuI. Lensacon. Appl Opt 1995; 34: 5761-5772.
  11. Hausler G, Heckel W. Light sectioning with large depth and high resolution. Appl Opt 1989; 28: 682-686.
  12. Koronkevich VP, Palchikova IG, Poleshchuk AG. Bifocal microscope with kinoform optical elements [In Russian]. Avtometriya 1987; 6: 15-22.
  13. Koronkevich VP, Poleshchuk AG, Palchikova IG. Data readout from compact disks by a laser pickup with diffraction optics. Sov J Quantum Electron 1988; 15(10): 2128-2134.
  14. Wada O, Sakurai T, Nakagami T. Resent progress in optoelectronic integrated circuits. IEEE J Quantum Electron 1988; 22(6): 805-821.
  15. Sedukhin AG. Diffraction reticles: The capabilities of novel optical components for displacement or distance measurement. Optik 1990; 85: 47-52.
  16. Malakara D. Optical production control [In Russian]. Moscow: "Mashinostroyenie" Publisher; 1985.
  17. Lukin AV, Mustafin KS. Holographic methods of control of aspherical surfaces [In Russian]. Soviet journal of optical technology 1979; 4: 53-59.
  18. Burge JH, et al. Null test optics for the MMT and Magellan 6.5-m ƒ/1.25 primary mirrors. Proc SPIE 1994; 2199: 658-669.
  19. Allen L, Angel JR, Mongus J, et al. The Hubble Space Telescope optical system failure report. NASA report (NASA, Washingtone, DC) 1990.
  20. Burge JH, Dettmann LR, West SC. Null correctors for 6.5-m ƒ/1.25 paraboloidal mirrors // Fabrication and Testing of Aspheres 1999: 182-186.
  21. Lukin AV, Mustafin KS. Holographic methods of control of aspherical surfaces [In Russian]. Soviet journal of optical technology 1979; 4: 53-59.
  22. Arnold SM, Kestner R. Verification and certification of CGH aspheric nulls. Proc SPIE 1995; 2536: 117-126.
  23. Poleshchuk AG, Churin EG, Korolkov VP. Hybrid refractive-diffractive corrector for high accuracy figure metrology of deep aspherical surfaces [In Russian]. Computer Optics 2000; 20: 76-79.
  24. Korolkov VP, Pruss C, Reichelt S, Tiziani H. Preliminary results in investigation of diffractive highefficiency objective for laser interferometry. Computer Optics 2002 (Accepted for publication).

© 2009, IPSI RAS
151, Molodogvardeiskaya str., Samara, 443001, Russia; E-mail: journal@computeroptics.ru ; Tel: +7 (846) 242-41-24 (Executive secretary), +7 (846) 332-56-22 (Issuing editor), Fax: +7 (846) 332-56-20