Using guided-mode resonance to design nano-optical spectral transmission filters
N.L. Kazanskiy, P.G. Serafimovich, S.B. Popov, S.N. Khonina

Image Processing Systems Institute of the RAS,
Samara State Aerospace University

Full text of article: Russian language.

Abstract:
Optimization of nano-optical spectral transmission filter is considered. Structure of the designed device takes into account details of its subsequent fabrication by nanoimprinting lithography. The filter optimization performed on computational cluster with parallel asynchronous stochastic method. Analysis of fabrication of the designed filter with nanoimprinting lithography is shown.

Key words:
nanooptics, spectral filter, nanoimprinting, stochastic optimization methods, parallel calculation, asynchronous algorithm.

References:

  1. Guo, L.Jay Progress in nanoimprint technology and its applications // J. Phys. D: Appl. Phys. - 2004. - P. 123-141.
  2. Color filter incorporating a subwavelength patterned grating in poly silicon / Yeo-Taek Yoon, Hong-Shik Lee, Sang-Shin Lee, Sang Hoon Kim, Joo-Do Park, Ki-Dong Lee // Optics express. - 2008. - Vol. 16, No. 4.
  3. Two-dimensional photonic crystal color filter development / Eun-Hyoung Cho, Hae-Sung Kim, Byoung-Ho Cheong, Prudnikov Oleg, Wenxu Xianyua, Jin-Seung Sohn, Dong-Joon Ma, Hwan-Young Choi, No-Cheol Park, Young-Pil Park // Optics express. - 2009. - Vol. 17, No. 10.
  4. Fabrication of Transmission Color Filters Using Silicon Subwavelength Gratings on Quartz Substrates / Yoshiaki Kanamori, Masaya Shimono, and Kazuhiro Hane // IEEE photonics technology letters. - 2006, October 15. - Vol. 18, No. 20.
  5. Ye, Y. Color filter based on a two-dimensional submicrometer metal grating / Yan Ye, Yun Zhou, and Linsen Chen // Applied optics. - 2009. - Vol. 48, No. 27.
  6. Magnusson, R. New principle for optical filters / R. Magnusson and S.S. Wang // Appl. Phys. Lett. - 1992. - V. 61. - P. 1022-1024.
  7. Moharam, M.G. Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach / M.G. Moharam, Drew A. Pommet, and Eric B. Grann // J. Opt. Soc. Am. A. - 1995, May. - V. 12(5). - P. 1077-1086.
  8. Peng, S. Efficient implementation of rigorous coupled-wa­ve analysis for surface-relief gratings / S. Peng, G.M. Mor­ris // J. Opt. Soc. Am. A. - 1995. - V. 12(5). - P.1087-1096.
  9. Li, L. Use of Fourier series in the analysis of discontinuous periodic structures / Lifeng Li // J. Opt. Soc. Am. A. - 1996. - V. 13(9). - P. 1870-1876.
  10. Babin, S. SCATT: software to model scatterometry using the rigorous electromagnetic theory / S. Babin, L. Doskolovich, Y. Ishibashi, A. Ivanchikov, N. Kazanskiy, I. Kadomin. A. Mikami, Y. Yamazaki // Proc. SPIE. - 2009. - Vol. 7272, Advanced Lithography. - P. 72723X. - DOI:10.1117/12.816904.
  11. Bezus, E.A. Diffraction structures calculation for focusing of surface electromagnetic waves / E.A. Bezus, L.L. Dos­ko­lovich, N.L. Kazanskiy, V.A. Soifer, S.I. Kharitonov, M. Pizzi, P. Perlo // Computer Optics. - 2009. - V. 33, N 2. - P. 185-192. - (in Russian)
  12. Kazanskiy, N.L. Calculation of optimal crosssections of photonic crystals waveguides by transfer matrix method / N.L. Kazanskiy, P.G. Serafimovich, S.I. Kharitonov // Izvestia of Samara Science Center RAS. - 2002. - V. 4, N 2. - P. 300-307. - (in Russian)
  13. Volotovsky, S.G. Methological topics of development parallel applications for computer optics and image processing fields, (in Russian) / S.G. Volotovsky, N.L. Kazan­skiy, S.B. Po­pov, P.G. Serafimovich, V.A. Soifer, V.A. Fursov // Proc. Conf. “Telematica 2002”, St?Peterburg, 2002. - P. 163-165.
  14. Kazansky, N.L. Mathematical Modeling of Optical Systems - Samara: SSAU, 2004. - 240 p.
  15. Shokooh-Saremi, M. Particle swarm optimization and its application to the design of diffracttion grating filters / M. Shokooh-Saremi and R. Magnusson// Optics Letters, - 2007. - V. 32, No. 8. - P. 894-896.
  16. Koh, B.-I. Parallel asynchronous particle swarm optimization / Byung-Il Koh, Alan D. George1, Raphael T. Haftka and Benjamin J. Fregly // Int. J. Numer. Meth. Engng. - 2006. - V. 67. -P. 578-595.
  17. Brueck, S.R.J. Optical and Interferometric Lithography - Nanotechnology Enablers, Proc. IEEE, 2005, Vol. 93, No. 10, P.1704-1721.

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