Modifictaion of the device for detection of cleanliness and flatness of optical substrates
P.Yu. Izotov, M.S. Glyanko, S.V. Sukhanov

Image Processing Systems Institute, Russian Academy of Sciences,

Samara State Aerospace University

Full text of article: Russian language.

Abstract:
The current paper presents research of new construction of device for detection of flatness and cleanliness of optical substrate from the dynamic state of a liquid drop deposited on its surface. This work contains results of study of the device in application to rapid assessment of surface cleanliness of substrates made of glass, sitall and chrome.

Key words:
roughness estimation of optical surface, estimation of optical substrate cleanliness, device for rapid assessment, wettability, liquid drop spreading, image of a liquid drop.

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