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Application of thin molybdenum films in contact masks for manufacturing the micro-relief of diffractive optical elements
A.V. Volkov, O.Yu. Moiseev, S.D. Poletaev, I.V. Chistyakov

 

Image Processing Systems Institute, Russian Academy of Sciences,
Samara State Aerospace University,

SLL Interlab

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Full text of article: Russian language.

DOI: 10.18287/0134-2452-2014-38-4-757-762

Pages: 757-762.

Abstract:
We investigate the parameters of microstructures obtained by laser thermochemical writing in molybdenum films of thickness 17, 35, and 70 nm deposited on glass and quartz substrates. Graphs of the spatial resolution of the microstructures as a function of the laser power are plotted for different substrate materials. It is shown that a higher spatial resolution of the microstructures can be achieved in the molybdenum films with a 17-nm thickness.

Key words:
microstructure, laser ablation, thermal recording of a molybdenum film, glass and quartz substrates.

Citation:
Volkov AV, Moiseev OY, Poletaev SD, Chistyakov IV. Application of thin molybdenum films in contact masks for manufacturing the micro-relief of diffractive optical elements. Computer Optics 2014; 38(4): 757-762. DOI: 10.18287/0134-2452-2014-38-4-757-762.

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