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Simulation of characteristics of a nanophotonic electrooptical modulator on a silicon on insulator structure
N.V. Masalsky

 

Scientific Research Institute for System Analysis of the Russian Academy of Sciences

 

DOI: 10.18287/0134-2452-2015-39-2-152-157

Full text of article: Russian language.

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Abstract:
A promising approach to simulating characteristics of silicon nanophotonic modulators fabricated using a standard Silicon On Insulator (SOI) fabrication process is discussed. Optical characteristics of the waveguide structure are changed by means of the free-carrier dispersion effect. On the basis of numerical calculations, the device topological parameters are optimized for achievement of superior modulation characteristics.

Keywords:
silicon photonic, waveguide optical structure, eloctrooptical modulator, Silicon On Insulator (SOI).

Citation:
Masalsky NV. Simulation of characteristics of a nanophotonic electrooptical modulator on a silicon on insulator structure. Computer Optics 2015; 39(2): 152-157. DOI: 10.18287/0134-2452-2015-39-2-152-157.

References:

  1. Soifer, V.A. Nanophotonic and diffraction optics / V.A. Soi­fer // Computer Optics. – 2008. – Vol. 32(2). – P. 110-119. – ISSN 0134-2452. – (In Russian).
  2. Soref, R. The past, present, and future of silicon photonics/ R. Soref // IEEE J. Selected Topics in Quantum Electronics.– 2006. – Vol. 12(11). – P. 1678-1687.
  3. Ahn, J. Devices and architectures for photonic chip-scale integration / J. Ahn, M. Fiorentino, R.G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N.P. Jouppi, M. McLaren, C.M. Santori, R.S. Schreiber, S.M. Spillane, D. Vantrease, Q. Xu // Applied Physics A. – 2009. – Vol. 95(5). – P. 989-997.
  4. Cocorullo, C. Silicon thermo-optical micro-modulator with 700 kHz and 3 dB bandwidth / C. Cocorullo, M. Iodice, I. Rendina, P.M. Sarro // IEEE Photonic Technology Letters. – 1995. – Vol. 7(1). – P. 363-365.
  5. Soref, R. Electro optical effects in silicon / R. Soref, B. Ben­nett // IEEE QuantumElectronics – 1987. – Vol. 23(1). – P. 123-129.
  6. Salib, M. Silicon Photonics / M. Salib, L. Liao, R. Jones, M. Morse, A. Liu, D. Samara-Rubio, D. Alduino, M. Paniccia // Intel Technology Journal. – 2004. – Vol. 8(1). – P. 143-160.
  7. Bogaerts, W.Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology / W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Campenhout, P. Bienstman, D. Thourhout //IEEE Journal of Lightwave Technology. – 2005. – Vol. 23(2). – P. 401-412.
  8. Liu, A. High-speed optical modulation based on carrier depletion in a silicon waveguide / A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, M. Paniccia //Optics Express. – 2007. – Vol. 15(3). – P. 660-668.
  9. Feng, N. 30GHz Ge electro-absorption modulator integrated with 3μm silicon-on-insulator waveguide / N. Feng, D. Feng, S. Liao, X. Wang, P. Dong, H. Liang, C. Kung, W. Qian, J. Fong, R. Shafiiha, Y. Luo, J. Cunningham, A. Krishnamoorthy, M. Asghari //Optics Express. – 2011. – Vol. 19(22). – P. 7062-7067.
  10. Silvaco Internationnal, 4701 Patrick Henry drive, Bldg 1, Santa Clara, CA 94054 [Electronical Resource]. – URL:http://www.silvaco.com/ (request date 1.12.2012).
  11. Hewitt, P.D. Improved modulation performance of a silicon p-i-n device by trench isolation / P.D. Hewitt, G.T. Reed // IEEE Lightwave Technology. – 2001. – Vol. 19(2). – P. 387-395.
  12. Rsoft Photonic CAD Suite by RSoft Design Group, Inc. [Electronical Resource]. – URL: http://www.rsoftdesign.com (request date 27.01.2014).
  13. ��salsky, N.V. Characteristics of the submicronic photon phase modulator on structure "silicon on an insulator" / N.V. Masalsky // Nano- and Microsystem Technique. – 2013. – Vol. 10. – P. 38-42. – ISSN 1813-8586. – (In Russian).
  14. Cutolo, A. Silicon electro-optic modulator based on a three terminal device integrated in a low-loss single-mode SOI waveguide / A. Cutolo, M. Iodice, P. Spirito, L. Zeni // IEEE Lightwave Technology. – 1997. – Vol. 15(2). – P. 505-511.
  15. Nakatsuka, O. Contact resistivities and electrical characteristics of Co/Si contact by rapid thermal annealing annealing / O. Nakatsuka, T. Ashizawa, H. Iwano, S. Zaima, Y. Yasuda // Proc. Adv. Metallization Conf. (AMC 1998). – 1999. – Vol. 784. – P. 605-610.
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