Monitoring a spatial intensity distribution of transmitted and reflected light in a  diffractive structure
D.A. Belousov, A.G. Poleshchuk, V.N. Khomutov

 

Institute of Automation & Electrometry Siberian Branch of the Russian Academy of Sciences, Novosibirsk, Russia

Full text of article: Russian language.

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Abstract:
We propose a method and a design of a device for an on-line monitoring of a spatial intensity distribution of transmitted and reflected diffraction orders found within a ±80° solid angle and a 360° azimuthal angle. The proposed device is intended to serve as a shape and depth profiler of the diffractive element microrelief in the course of manufacturing.

Keywords:
diffractive optics, computer optics, diffractive optical elements (DOEs), synthesized holograms, measuring system.

Citation:
Belousov DA, Poleshchuk AG, Khomutov VN. Monitoring a spatial distribution of transmitted and reflected light in a diffractive structure. Computer Optics 2015; 39(5): 678-87. – DOI: 10.18287/0134-2452-2015-39-5-678-687.

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