Full text of article: Russian language.

 PDF

Abstract:
An experimental laser system for studying the processes of micro– and nanostructure direct formation in a silica glass by picosecond laser pulses is described. A method of ablation monitoring based on the Shack-Hartmann wavefront sensor is proposed. Ablation craters on the surface of the silica glass varying in depth from 23 ± 4 to 144 ± 18 nm with good edge quality with the power density varying from 0.57 × 1012 to 31 × 1012 W/cm2, respectively, are synthesized. Higher-intensity modes of laser processing lead to the formation of cracks and chips on the surface of the material, with lower-intensity processing leading to the appearance of melting edges. The obtained structures are characterized using an atomic force microscope. The ablation rate of the silica glass is established.

Keywords:
laser ablation, nanostructure, a silica glass, picosecond laser pulses, Shack-Hartmann wavefront sensor.

Citation:
Zavyalova MA. Surface modification of silica glass by pulses of a picosecond laser. Computer Optics 2016; 40(6): 863-870. DOI: 10.18287/2412-6179-2016-40-6-863-870.

References:

1. Phillips KC, Gandhi HH, Mazur E, Sundaram SK. Ultrafast laser processing of materials: a review. Advances in Optics and Photonics 2015; 7(4): 684-712. DOI: 10.1364/AOP.7.000684.
2. Bulgakova NM, Stoyan R, Rosenfeld A. Laser-induced modification of transparent crystals and glasses [In Russian]. Quantum Electron 2010; 40(11): 966-985. DOI: 10.1070/QE2010v040n11ABEH014445.
3. Kononenko VV, Pashinin VP, Komlenok MS, Konov VI. Modification of silica glass by laser pulses of femtosecond duration [In Russian]. Computer optics 2009; 33(3): 254-260.
4. Dostovalov АV, Korolkov VP, Babin SA. Simultaneous formation of weakly and highly ordered laser-induced periodic surface structures on Ti film at femtosecond irradiation. Laser Phys Lett 2015; 12(3): 036101. DOI: 10.1088/1612-2011/12/3/036101.
5. Veiko VP, Dyshlovenko SS. Laser microstructure of surfaces [In Russian]. Scientific and technical journal of information technologies, mechanics and optics 2001; 4: 119-128.
6. Bulushev E, Bessmeltsev V, Dostovalov A, Goloshevsky N, Wolf A. High-speed and crack-free direct-writing of microchannels on glass by an IR femtosecond laser. Optics and Lasers in Engineering 2016; 79: 39-47. DOI: 10.1016/j.optlaseng.2015.11.004.
7. Christensen M, Byskov J, Christensen B, Balling P. Single-shot ablation of sapphire by ultrashort laser pulses. Applied Physics A 2010; 101(2): 279-282. DOI: 10.1007/s00339-010-5817-7.
8. Dausinger F, Dausinger F, Hugel H, Konov VI. Micro-machining with ultrashort laser pulses: From basic understanding to technical applications. Proc SPIE 2003; 5147: 106-115. DOI: 10.1117/12.537496.
9. Poleshchuk AG, Korolkov VP, Nasyrov RK. Diffractive optical elements: fabrication and application. Proc SPIE 2014; 9283: 928302. DOI:10.1117/12.2073301.
10. Bessmeltsev VP, Bulushev ED. Optimization of laser micromachining regimes. Optoelectronics, instrumentation and data processing 2014; 50(6): 533-548. DOI: 10.3103/S8756699014060016.
11. Zavestovskaya IN, Krokhin ON, Men’kova NA. Analysis of the nonlinear absorption mechanisms of light absorption during irradiation of dielectrics and wide-gap semiconductors laser pulses of femtosecond duration [In Russian]. Scientific session MIPhI – 2008. Plasma physics and controlled thermonuclear fusion. Laser physics. Photonics and information optics. Physics of condensed matter 2008; 2: 121-123.
12. Molian P, Pecholt B, Gupta S. Picosecond Pulsed Laser Ablation and Micromachining of 4H–SiC Wafers. Applied Surface Science 2009; 255(8): 4515-4520. DOI: 10.1016/j.apsusc.2008.11.071.
13. Dausinger F, Hugel H, Konov V. Micro-machining with ultrashort laser pulses: From basic understanding to technical applications. Proc SPIE 2003; 5147: 106-115. DOI: 10.1117/12.537496.
14. Bachmann F, Muller J, Klimt B, Knappe R. Micromachining materials by picosecond lasers [In Russian]. Photonics 2013; 1(37): 34-40.
15. Bykovsky NE, Senatskiy YV, Zavedeev EV, Ralchenko VG. Changes in the surface structure of the YAG crystal by action of nanosecond pulses of of broadband laser radiation: morphology of craters and deformation material [In Russian]. 11-th International Conference "Interaction of radiation with solids", September 23-25, 2015 Minsk, Belarus: 39-41.
16. Chernonozhkin SM, Saprykin AI. Ablation features of glass and steel and their effect on LA-ICP-MS analysis results [In Russian]. Analysis and control 2011; 15(4): 413-420.
17. Votyakov SL, Adamovich NN. On On the laser evaporation processes and the usage of calibration solutions for analysis of some minerals by laser ablation mass-spectrometry [In Russian] // Lithosphere 2011; 4: 56-69.
18. Bulgakova NM. The study of the dynamics and mechanisms of laser ablation in modes milli, nano- and femtosecond pulses [In Russian]. The dissertation on competition of a scientific degree of the doctor of physical and mathematical sciences. Novosibirsk: 2012.
19. Glagolev SP. Quartz glass: its properties, manufacture and application [In Russian]. Moscow: ONTI, “State chemical-technical” Publisher; 1934.
20. Delone NB. Nonlinear optics [In Russian]. Moscow: “Fizmatlit” Publisher; 2003.
21. Born M, Wolf E. Principles of optics. 4th ed. Oxford, New York: Pergamon Press; 1973.
22. Machulka GA. Laser processing of glass [In Russian]. Moscow: “Soviet Radio” Publisher; 1979.
23. Klimentov SM, Garnov SB, Konov VI, Kononenko PA, Pivovarov OG, Zar`kova OG, Bratling D, Dausinger F. The role of low-threshold breakdown of air in ablation of materials by short laser pulses [In Russian]. Proceedings of General physics Institute Prokhorov AM 2004; 60: 13-17.
24. Kononenko TV, Kononenko VV, Konov VI, Pimenov SM, Garnov SV, Tishchenko AV, Prokhorov AM, Khomich AV. Formation of antireflective surface structures on diamond films by laser patterning [In Russian]. Appl Phys A 1999; 68(1): 99-102. DOI: 10.1007/s003390050860.
25. Kononenko VV, Kononenko TV, Konov VI, Pimenov SM, Garnov SV, Tishchenko AV, Prokhorov AM, Khomich AV. Creation of antireflecting structures on the surfaces of diamond films by laser drawing method [In Russian]. Quantum Electronics 1999; 29(2): 158-162.
26. Jackson RG. The latest sensors [In Russian]. Moscow: “Technosphere” Publisher; 2008.
27. Ruprecht AK, Pruss C, Tiziani HJ, Osten W, Lücke P, Last A, Mohr J, Lehmann P. Confocal microoptical distance-sensor: principle and design. Proc SPIE 2005; 5856: 128-135. DOI: 10.1117/12.612008.
28. Tiziani HJ, Wegner M, Steudle D. Confocal principle for macro- and microscopic surface and defect analysis. Opt Eng 2000; 39(1): 32-39. DOI: 10.1117/1.602332.
29. Shpeizman VV, Peschanskay NN. The use of interferometric methods of measuring the magnitude and speed of movement for non-destructive testing of material [In Russian]. Physics of the solid state 2007; 49(7): 1201-1205.
30. Porter J, Queener H, Lin J, Thorn K, Awwal AAS, eds. Adaptive optics for vision science: principles, practices, design and applications. New York: John Wiley & Sons, Inc; 2006. ISBN: 978-0-471-67941-7.

---

© 2009, IPSI RAS
Institution of Russian Academy of Sciences, Image Processing Systems Institute of RAS, Russia, 443001, Samara, Molodogvardeyskaya Street 151; E-mail: journal@computeroptics.ru; Phones: +7 (846) 332-56-22, Fax: +7 (846) 332-56-20