Error analysis in digital processing of the results of interferometric control of nano-scale local deviations of optical surfaces
Denisov D.G.

 

Bauman Moscow State Technical University, Moscow, Russia

Full text of article: Russian language.

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Abstract:
A dynamic interferometry method for controlling nano-scale local deviations of optical surfaces from a prescribed profile is developed, theoretically substantiated, and experimentally verified on the basis of an algorithm for calculating an objective function, defined as the spectral density of a one-dimensional correlation function. Theoretical and experimental approaches to determining the root-mean-square error when finding local deviations of the optical surfaces for the element diameters ranging from 100 mm to 1,000 mm are presented, while taking into account the non-excluded systematic and random error components in determining the objective function.

Keywords:
optical control, interferometry, surface measurements, power spectral density, method errors, edge effect, the effect of "leakage" of frequency.

Citation:
Denisov DG. Error analysis in digital processing of the results of interferometric control of nano-scale local deviations of optical surfaces. Computer Optics 2017; 41(6): 820-830. DOI: 10.18287/2412-6179-2017-41-6-820-830.

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