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Improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams: modeling and experiment
V.P. Kiryanov 1, N.A. Gurin 1,2

1 Institute of Automation and Electrometry of the Siberian Branch of the Russian Academy of Sciences,
630090, Novosibirsk, Russia, Academician Koptyug avenue, 1;
2 SC "Novosibirsk Instrument-Making Plant", 630049, Novosibirsk, Russia, st. Dusi Kovalchuk, 179/2

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DOI: 10.18287/2412-6179-CO-1161

Pages: 235-245.

Full text of article: Russian language.

Abstract:
A brief review of methods for increasing the diffraction efficiency of optical elements synthesized by direct laser writing is done. It is noted that the previously proposed methods for recording the topology of similar elements using volumetric or surface contour masks do not provide an ultimate solution to a problem of increasing the diffraction efficiency. The performed model and physical experiments on the fabrication of structures of surface-relief phase optical elements by recording zone profiles using oblique laser beams show the fundamental possibility of forming steep side walls of the reverse zone slopes and the feasibility of developing this technology based on laser image generators.

Keywords:
diffractive optical elements, diffraction efficiency, direct laser record, optical technologies.

Citation:
Kiryanov VP, Gurin NA. Improving the diffraction efficiency of structures in direct laser writing using obliquely incident beams: modeling and experiment. Computer Optics 2023; 47(2): 235-245. DOI: 10.18287/2412-6179-CO-1161.

Acknowledgements:
This work was supported by the Ministry of Science and Higher Education within Project No. 121042900050-6.

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