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The use of a circle laser writing system for the manufacture of halftone patterns
of diffractive optical elements based on DLW glass plates
P. Perlo, M. Ripetto, S. Sinesi1, G. Uspleniev2
1FIAT Research Center, Orbassano, Italy
2Image Processing Systems Institute of RAS

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Pages: 85-90.

Full text of article: Russian language.

Abstract:
A circle laser writing system (CLWS) was used to investigate new direct laser write glass photoplates (DLW glass) for the production of halftone photomasks of diffractive optical elements (DOEs). Some peculiarities of writing on these plates were noticed, which appeared when writing asymmetric DOEs. High resolution and quality of writing the halftones was obtained using the special properties of DLW glass plates. The article presents the parameters and fragments of halftone photomasks of a bifocal lens and a raster of microlenses synthesized on CLWS.

Citation:
Perlo P, Ripetto M, Sinesi S, Uspleniev G. The use of a circle laser writing system for the manufacture of halftone patterns of diffractive optical elements based on DLW glass plates. Computer Optics 1997; 17: 85-90.

References:
  1. Poleshchuk AG. Fabrication of high efficiency diffractive optical elements using halftone and photorastered technologies. Avtometriya; 1991; 6.
  2. Poleshchuk AG. Methods of fabricating the surface profile of diffractive optical elements. Computer Optics 1996; 16: 54-61.
  3. N.F. Borrelli and D.L.Morse. Microlens arrays produced by a photolytic technique.// Applied Optics., Vol. 27, No. 3. 1988.
  4. Jurgen Jahns and Susan J. Walker. Twodimensional array of diffractive microlenses fabricated by thin film deposition. // Applied Optics Vol. 29, No. 7, 1990.
  5. V.P.Koronkevich, V.P.Kiryanov, V.P.Korolkov, A.G.Poleshchuk, V.V.Cherkashin, E.G.Churin, A.A.Kharissov. Fabrication of diffractive optical elements by direct laser writing with circular scanning. // SPIE, Vol. 2363, 1995.

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