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Synthesis of a diffractive optical element microrelief using polyimide films

V.I. Berendyaev1, A.V. Volkov, N.L. Kazanskiy, B.V. Kotov1, V.S. Soloviev

Image Processing Systems Institute of RAS

1Karpov Institute of Physical Chemistry

 PDF, 268 kB

Pages: 90-92.

Full text of article: Russian language.

Abstract:
The paper proposes a method for the synthesis of microrelief of diffractive optical elements (DOEs) using polyimide films being plasma-resistant materials in the function of a photosensitive layer. The authors investigate the possibility of obtaining a higher microrelief with smaller thickness of the photosensitive layer.

Citation:
Berendyaev VI, Volkov AV, Kazanskiy NL, Kotov BV, Soloviev VS. Synthesis of a diffractive optical element microrelief using polyimide films. Computer Optics 2000; 20: 90 - 92.

References:

  1. Brui EB, Koreshkov SN. Optika i Spektroskopiya; 1989; 67(3): 685.
  2. Galperin AD, Smaev VP, Selyavko LV, Shelekhov NS. Leningrad: Collection of Scientific Works of Ioffe Physical-Technical Institute; 1988.
  3. Methods of computer optics edited by V.A. Soifer, Moscow: Fizmatlit; 2000: 688. [4] Soloviev VS. Computer Optics 1989; 10-11: 145.
  4. Volkov AV, Rybakov OE, Soloviev VS. Computer Optics 1997; 17: 94-96. [6] Volkov AV, Kazanskiy NL, Soloviev VS. Computer optics 1998; 18: 130-133.

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