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Automated device for substrate surface cleanliness estimation from the dynamic state of a liquid drop deposited on its surface

S.A. Borodin1, A.V. Volkov 2, N.L. Kazanskiy1
1Penza State University of Architecture and Construction 

2Samara State Aerospace University named after academician S.P. Korolev 


 PDF, 1946 kB

Pages: 69-75.

Abstract:
The article discusses the methods for assessing the surface cleanliness factor of the substrates intended to form a microrelief of diffractive optical elements (DOEs). An automated device is proposed to control the surface cleanliness factor by the dynamic state of a liquid droplet. The experimental results on evaluation of a liquid droplet behavior obtained using a high-speed video camera are presented.

Keywords:
liquid drop, diffractive optical elements, DOEs, microrelief, high-speed video camera.

Citation:
Borodin SA, Volkov AV, Kazanskiy NL. Automated device for substrate surface cleanliness estimation from the dynamic state of a liquid drop deposited on its surface. Computer Optics 2005; 28: 69-75.

References:
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