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A microscope image processing method for analyzing TLIPSS structures

D.A. Belousov1, A.V. Dostovalov1,2, V.P. Korolkov1, S.L. Mikerin1

1 Institute of Automation and Electrometry of the SB RAS,
630090, Novosibirsk, Russia, Acad. Koptyug Ave 1,
2 Novosibirsk State University,
630090, Novosibirsk, Russia, Pirogova St. 2

 PDF, 1595 kB

DOI: 10.18287/2412-6179-2019-43-6-936-945

Pages: 936-945.

Full text of article: Russian language.

Abstract:
The paper describes a method for processing microimages of thermochemical laser-induced periodic surface structures (TLIPSS) to quantify their structural order and defects. Results of its application for the analysis of microimages of periodic structures formed in 30-nm chromium films by an astigmatically focused femtosecond Gaussian laser beam have been presented. Dependences of the relative area of the beam-modified region, the area of defects, and the ordering of the periodic structures on the scanning speed and the writing beam power have been obtained.

Keywords:
digital image processing, microscope image processing, laser materials processing, laser-induced periodic surface structures.

Citation:
Belousov DA, Dostovalov AV, Korolkov VP, Mikerin SL. A microscope image processing method for analyzing TLIPSS structures. Computer Optics 2019; 43(6): 936-945. DOI: 10.18287/2412-6179-2019-43-6-936-945.

Acknowledgements:
In the research, we used the equipment of the multiple-access Center «Spectroscopy and Optics» at IA&E SB RAS. This work was supported by the Ministry of Education and Science of the Russian Federation under grant АААА-А17-117052210002-7 (Processing of microimages) and grant АААА-А17-117062110026-3 (TLIPSS formation).

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