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Optical measurement of characteristics of thin films using a spiral zone plate
A.G. Nalimov 1,2, E.S. Kozlova 1,2, S.S. Stafeev 1,2, V.V. Kotlyar 1,2, V.V. Podlipnov 1,2

1 Image Processing Systems Institute, NRC "Kurchatov Institute",
443001, Samara, Russia, Molodogvardeyskaya 151;
2 2Samara National Research University,
443086, Samara, Russia, Moskovskoye Shosse 34

 PDF, 2472 kB

DOI: 10.18287/2412-6179-CO-1493

Pages: 21-29.

Full text of article: Russian language.

Abstract:
In this work we propose a method for measuring physical characteristics of thin samples (thin films), including thickness, refractive index and tilt by moving the observation plane. The measurements are made utilizing a vortex spiral zone plate, which forms three intensity maxima that rotate when moving along optical axis. The error in measuring the tilt of a sample is a fraction of a degree, and the error in measuring its thickness is less than 5 nm. By the numerical simulation, three intensity maxima are shown to be formed after a metalens, rotating in space with an angular velocity of 136°/μm, which is almost twice as high as was reported in similar works.

Keywords:
spiral zone plate, thickness sensor, shift sensor.

Citation:
Nalimov AG, Kozlova ES, Stafeev SS, Kotlyar VV, Podlipnov VV. Optical measurement of characteristics of thin films using a spiral zone plate. Computer Optics 2025; 49(1): 21-29. DOI: 10.18287/2412-6179-CO-1493.

Acknowledgements:
The work was partly funded by the Russian Science Foundation under grant #23-12-00236 (Section "Numerical simulation") and NRC “Kurchatov Institute” within a government project (Sections “Introduction” and “Conclusion”).

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