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Formation of nano-sized radiation flows
using waveguide-resonance X-ray devices
E.V. Egorov 1,2,3, V.K. Egorov 1

1 IMT RAS, Academika Osipyana Str. 6, Chernogolovka, 142432, Russia;
2 IRE RAS, Skver Vvedenskogo 1, Fryazino, 141190, Russia;
3 Financial University under the Government of the Russian Federation,
Leningradskiy Prospekt 49/2, Moscow, 125167, Russia

  Full text (PDF)

DOI: 10.18287/COJ1870

Article ID: 1870

Language: Russian

Abstract:
A number of experimental and modeling studies of peculiarities of generating nanoscale streams of quasi-monochromatic X-ray radiation using devices utilizing a phenomenon of waveguide-resonant propagation of radiation streams are carried out. Approaches allowing one to increase the integral intensity of simplest planar X-ray waveguide resonators and reduce the angular divergence of the generated X-ray beams without changing parameters of the laboratory radiation sources are proposed. It is shown that a composite flat X-ray waveguide-resonator composed of two simplest waveguide-resonators located one after the other and mutually adjusted to make parallel their slit gaps, allows one to reduce the angular divergence of the resulting flux while maintaining its integral intensity, although significantly worsening the degree of its monochromaticity. A phenomenological model of the observed effect is developed. It is shown that in crossed geometry, when slit gaps of the planar X-ray waveguide resonators are mutually rotated by 90 degrees, it becomes possible to form an ultra-narrow nanoscale-size X-ray beam with an integral density acceptable for X-ray lithography.

Keywords:
waveguide-resonator, standing wave, interference field, divergence, composite waveguide-resonator, PXWR, lithography.

Acknowledgements:
This work was financially supported by the Ministry of Science and Higher Education under a government project 075-00295-25-00.

Citation:
Egorov EV, Egorov VK. Formation of nano-sized radiation flows using waveguide-resonance X-ray devices. Computer Optics 2026; 50(5): 1870. doi: 10.18287/COJ1870.

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