(17) * << * >> * Russian * English * Content * All Issues

Accuracy of fabrication of diffractive optical elements by means of laser writing
systems with circular scanning
V.P. Koronkevich, V.P. Korolkov, A.G. Poleshchuk, A.A. Kharisov, V.V. Cherkashin
Institute of Automation and Electrometry of the Siberian Branch of RAS, Novosibirsk

 PDF, 991 kB

Pages: 63-74.

Full text of article: Russian language.

Abstract:
The paper investigates typical sources of errors arising in the production of diffractive optical elements by laser writing systems with circular scanning. It proposes to estimate the writing errors by analyzing the wavefronts of the simplest test structures produced by the writing system - linear diffraction gratings and circular zone plates. An assessment of the operation accuracy of the laser writing system developed at the Institute of Automation and Electrometry SB RAS is provided as an example. The system is intended for the production of binary amplitude, multilevel, grayscale and phase diffractive elements with the characteristic microstructure size of less than 1 μm on the substrates with the diameter of up to 300 mm. Interferometric measurements of wavefront errors of the produced binary zone plate with the diameter of 58 mm and the numerical aperture of 0.45 showed that the root-mean-square recording error does not exceed 0.04 μm.

Citation:
Koronkevich VP, Korolkov VP, Poleshchuk AG, Kharisov AA, Cherkashin VV. Accuracy of fabrication of diffractive optical elements by means of laser writing systems with circular scanning. Computer optics. 1997; 17: 63-74.

References:
  1. Koronkevich VP, Lenkova GA, Mikhaltsova IA. Kinoform lenses: an optical method of producing a photomask. Avtometriya; 1977; 5: 71-79.
  2. Hatley M. C., Stevens R.F., Wilson S.J. The manufacturing of blazed zone plates using a Fabry-Perot interferometer // J. Mod.Opt. 1988. 35, №. 2. P. 265-280.
  3. Riedl M., McCann J. Analysis and performance limits of diamond turned diffractive lenses for 3-5and 8-12 micrometer region // SPIE Critical Review. 1991. CR 38.
  4. Schwider J., Burow R. Testing of aspherics by means of rotation-symmetric synthetic holograms //Opt. Appl., 1976 v.6, P.83-88.
  5. Koronkevich V. P., Kirianov V. P., Kokoulin F.I., Poleshchuk et. al. I. Fabrication of kinoform optical elements // Optik. 1984. 67, № 3, P. 257-266 .
  6. Goltsos W., Liu S. Polar coordinate laser writer for binary optics fabrication // Proc. SPIE. 1990. 1211. P.137-147.
  7. Nomura T., Kamiya K. An instrument for manufacturing zone-plates by using a lathe // Precision Engineering. 1994. 16. P. 290- 295.
  8. Ogata S., Tada M., Yoneda M. Electron-beam writing system and its application to large and highdensity diffractive optic elements // Appl. Opt. 1994. 33, P.2032-2038.
  9. Koronkevich V. P., Kiriynov V. P, Korolkov V. P., A. G. Poleshchuk, et al. Fabrication of diffractive optical elements by direct laser-writing with circular scanning // Proc.of SPIE. 1995. 2363, P.290-297.
  10. Buynov N., Larionov N. P., Lukin A. V. et al. Holographic interferometric inspection of aspherical surfaces // Optical Technology. 1971. 38. P. 194-197.
  11. Turunen J., Vasara A., Friberg A. Holographic generation of diffractive-free beams // Apll. Opt. 1988. 27. P.3959.
  12. Neugebauer G., Hauck R., Bryngdahl O.. Computer-generated holograms: carrier of polar geometry // Appl. Opt. 1985. 24, N 6. P.777-784.
  13. Burge H. Advance technology for measuring primary mirrors for astronomical telescopes. Dr. Ph. Dissertation. University of Arizona, 1993.
  14. Cherkashin V.V., E.G. Churin, J.H. Burge, V.P.Koronkevich, et al. Processing parameters optimization for thermochemical writing of DOEs on chromium films // Proc. SPIE, 1997. 3010. P.168-179.
  15. Cherkashin V.V., Churin E.G., Kirianov A.V. et at. Circular laser writing system - CLWS-300C / EOS Topical Meeting Digest Series// Diffractive Opitics. 1997. 12. P. 222-223.
  16. Palchikova IG, Ryabchun AG. Effect of fabrication errors of kinoforms on the function of the pupil. Avtometriya; 1985; 6.
  17. Vedernikov VM, Byukhin VN, Kiryanov VP. Precision photoplotter for synthesis of optical elements. Avtometriya. 1981; 3: 3- 16.
  18. Koronkevich VP, Poleshchuk AG, Churin EG, Yurlov YI. Laser thermochemical technology for synthesis of diffraction opticalelements on chromium films. Soviet Journal of Quantum Electronics; 1985; 4: 755-761.

© 2009, IPSI RAS
151, Molodogvardeiskaya str., Samara, 443001, Russia; E-mail: journal@computeroptics.ru ; Tel: +7 (846) 242-41-24 (Executive secretary), +7 (846) 332-56-22 (Issuing editor), Fax: +7 (846) 332-56-20