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Pages: 131-133
Full text of article: Russian language.
Abstract:
The industrial application of high-power CO2 lasers (λ = 10.6 μm) gives rise to the interest in diamond diffractive elements intended for focusing laser radiation to the areas of various configurations. In particular, the works [1-3] analyzed the diffractive optical elements (DOEs) - focusators and lenses produced by direct laser etching of a diamond film surface (n = 2.4) by selective ablation using an excimer UV laser. This method does not allow to form an ideal stepped profile of the diffraction microrelief due to the peculiarities of the technology, which leads to deviations from the DOE design characteristics. Systematic local microrelief distortions appear at the boundaries of elementary etching areas. The subject of this work is the study of the influence of subwavelength errors by the method of numerical simulation using the difference scheme for Maxwell’s equations. A four-level cylindrical diffractive lens was selected as an example.
Citation:
Golovashkin DL, Duparre M, Pavelyev VS, Soifer VA.Simulation of IR beams transmission through a diamond diffractive lens with subwavelength technological errors of the microrelief. Computer Optics 2001; 21: 131-133.
References:
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