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Research and development of technology of DOE microrelief formation on sapphire substrates

A.V. Volkov1,2, O.G. Istinova 2, N.L. Kazanskiy1,2, G.F. Kostyuk2
1 Image Processing Systems Institute of RAS

 2 Samara State Aerospace University


 PDF, 403 kB

Pages: 70 - 73.

Abstract:
A method for the formation of the phase microrelief of sapphire (leucosapphire) diffractive optical elements (DOE) has been proposed and implemented. Using this method, a binary structure on a sapphire substrate was produced and investigated, this structure operates in ultraviolet range as a diffractive lens with a focal length of f≈50 mm. It is shown that sapphire is a real alternative to quartz plates and diamond-like films when used as a DOE substrate material. The parameters were chosen for the formation of a given microrelief on sapphire substrates on the basis of ion-chemical etching in Freon-14.

Keywords:
DOE, on sapphire substrate, binary structure, ultraviolet range, quartz plate, Freon-14.

Citation:
Volkov AV, Istinova OG, Kazanskiy NL, Kostyuk GF. Research and development of technology of DOE microrelief formation on sapphire substrates. Computer Optics 2002; 24: 70-73.

References:
  1. Golovashkin DL, Duparré M, Pavelyev VS, Soifer VA. Simulating the transmission of IR radiation through a diamond diffractive lens with subwavelength microrelief technological errors [In Russian]. Computer Optics 2001; 21: 131-133.
  2. Kononenko VV, Konov VI, Pimenov SM, Prokhorov AM, Kazanskiy NL, Pavelyev VS, Soifer VA. Studies of diamond diffractive cylindrical lens [In Russian]. Computer Optics 1999; 19: 102-105.
  3. Volkov AV, Kazanskiy NL, Usplenyev GV. Production and investigational study of focusators into a ring and two points [In Russian]. Computer Optics 1999; 19: 132-136.
  4. Volkov AV, Doskolovich LL, Kazanskiy NL, Uspleniev GV, Zanelly A. Creation and study of binary focusing devices for a high-power ND-YAG laser [In Russian]. Computer Optics 2000; 20: 84-89.
  5. Mishkarenko YN. Highly heat-conductive materials in microwave electronics [In Russian]. Moscow: "CNII Elektronika" Publisher; 1988.
  6. Batygina EI, Batygin VN, Bravinsky VG, Kotyurgina OA, Kulikov VI. Dielectric substrates for microwave integrated circuits [In Russian]. Moscow: "CNII Elektronika" Publisher; 1980.
  7. Koritskiy YV, Pasinkov VV, Tareev BM, eds. Handbook of electrical materials [In Russian]. Leningrad: "Energiya" Publisher; 1976; 3: 748, 772-773.
  8. Prokhorov AM. Big encyclopedic dictionary [In Russian]. Moscow: "Sovetskaya Enciklopediya" Publisher; 1991; 2: 654.

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