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Formation of laser beams with a structured polarization distribution for the fabrication of spiral microreliefs in thin films of chalcogenide glasses
A.P. Porfirev 1,2, S.N. Khonina 1,2, N.A. Ivliev 1,2, O.P. Porfirev 2,3

1 Image Processing Systems Institute, NRC "Kurchatov Institute",
443001, Samara, Russia, Molodogvardeyskaya 151;
2 Samara National Research University,
443086, Samara, Russia, Moskovskoye Shosse 34;
3 Lebedev Physical Institute,
443034, Samara, Russia, Novo-Sadovaya 221

 PDF, 1229 kB

DOI: 10.18287/2412-6179-CO-1501

Pages: 676-680.

Full text of article: Russian language.

Abstract:
We propose a method of the formation of spiral-shaped microreliefs in thin films of chalcogenide glasses. The method is based on projection lithography using laser beams with a structured polarization distribution. To control the polarization of the initial laser beam, a spatial light modulator HOLOEYE LC 2012 is used. It is shown that changing the contrast of the mask images displayed on the modulator display affects the convexity/concavity of the formed profiles. This approach can be effectively used for the direct laser fabrication of more complex nano-/microelements, as well as their arrays.

Keywords:
polarization, spatial light modulator, spiral microrelief, chalcogenide glasses, laser processing.

Citation:
Porfirev AP, Khonina SN, Ivliev NA, Porfirev DP. Formation of laser beams with a structured polarization distribution for the fabrication of spiral microreliefs in thin films of chalcogenide glasses. Computer Optics 2024; 48(5): 676-680. DOI: 10.18287/2412-6179-CO-1501.

Acknowledgements:
This work was financially supported by the Russian Science Foundation under project No. 22-79-10007 (experimental results) and within the state assignment of the National Research Center "Kurchatov Institute" (preparation of the spatial light modulator for the experiments).

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