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Optimization for direct laser writing of continuous-relief diffractive optical elements

R.V. Shimansky, A.G. Poleshchuk, V.P. Korolkov, V.V. Cherkashin, A.A. Kharisov

Institute of Automation and Electrometry of the Siberian Branch of the Russian Academy of Sciences (Novosibirsk)

 PDF, 321 kB

Pages: 80-83.

Full text of article: Russian language.

Abstract:
A new method was developed for the presentation of data describing the topology of diffractive optical elements for the scanning image recorders. The proposed vector-gradient data format is based on piecewise-linear approximation of the diffraction zone profile. A programmable vector-gradient generator supporting this format was developed. Experimental samples of diffractive optical elements were produced.

Citation:
Shimansky RV, Poleshchuk AG, Korolkov VP, Cherkashin VV, Kharisov AA. Optimization for direct laser writing of continuous-relief diffractive optical elements. Computer Optics 2000; 20: 80 - 83.

References:

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  3. E.B. Kley, C. Wu, “Adapting existing e-beam writers to write HEBS-glass gray scale masks”, in Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI, ed. by S.H.Lee and R.L.Sutherland, Proc. of SPIE, 3633, 35-45, (1999).
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